SEMI E25 : 92(R1999)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
CLUSTER TOOL MODULE INTERFACE: MODULE ACCESS GUIDELINE
01-11-2004
12-01-2013
It defines an envelope within which a cluster tool module is situated. Exit and entry locations through the envelope and connection locations to the module for facility and utilities services are recommended. The aim of the cluster tool module access guideline is to provide assistance in the placement of utilities and facility services to cluster tool modules to improve access for service and maintenance and to make cluster tool installation easier.
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