SEMI E39.1 : 2003(R2014)
Current
Current
The latest, up-to-date edition.
SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
Published date
12-01-2013
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Pertains to all implementations of Object Services that use the SECS-II message protocol (SEMI E5) and provide general terminology, conventions, and notation for describing behaviour and data in terms of objects and object attributes.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E39. (11/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E94.1 : 2007 | SPECIFICATION FOR SECS-2 PROTOCOL FOR CONTROL JOB MANAGEMENT (CJM) |
| SEMI E98.1 : NOV 2002(R2009) | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL |
| SEMI E53 : 2004 | EVENT REPORTING |
| SEMI E87.1 : 2017 | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS) |
| SEMI E127.1 : 2008 | SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC) |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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