Name: SEMI E87.1 : 2017
Brand: SEMI

PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Maps the services and data of SEMI E87 to SECS-II streams and functions, and data definitions. Also applies to all implementations of SEMI E87 that use the SECS-II message protocol [SEMI E5]. Compliance to this standard requires compliance to both SEMI E87 and SEMI E5.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Not available separately, Published within the SEMI E87 family of standards. (02/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E15-1 : 2005(R2010)	SPECIFICATION FOR 300 MM TOOL LOAD PORT
SEMI E39.1 : 2003(R2014)	SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS)
SEMI E87 : 2017	SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

View more information

Sorry this product is not available in your region.

Access your standards online with a subscription

Features

Simple online access to standards, technical information and regulations.
Critical updates of standards and customisable alerts and notifications.
Multi-user online standards collection: secure, flexible and cost effective.

Get in touch with us

SEMI E87.1 : 2017

PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS)

Abstract

General Product Information

Standards Referencing This Book

Category

Subcategory