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  • SEMI E49.8 : 2003(R2011)

    Current The latest, up-to-date edition.

    GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Specifies guidelines for high purity (HP) and ultrahigh purity (UHP) gas distribution systems in semiconductor manufacturing equipment.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI F89 : 2012 SPECIFICATION FOR DIMENSION OF COMPACT SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F83 : 2012 SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F82 : 2012 SPECIFICATION FOR DIMENSION OF MASS FLOW CONTROLLER/MASS FLOW METER FOR 1.125 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F94 : OCT 2012 SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI E70 : 2013 GUIDE FOR TOOL ACCOMMODATION PROCESS
    SEMI F43 : 2008(R2013) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION BY POINT-OF-USE GAS PURIFIERS AND GAS FILTERS
    SEMI F84 : 2012 SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    SEMI F85 : 2012 SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F93 : OCT 2012 SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.5 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F91 : OCT 2012 SPECIFICATION FOR DIMENSION OF COMPACT SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F87 : 2012 SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F95 : OCT 2012 SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS FOR 1.5 INCH FOUR FASTENER CONFIGURATION TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F88 : 2012 SPECIFICATION FOR DIMENSION OF STANDARD SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F90 : OCT 2012 SPECIFICATION FOR DIMENSION OF STANDARD SIZE TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F86 : 2012 SPECIFICATION FOR DIMENSION OF TWO PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
    SEMI F92 : OCT 2012 SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI F17 : 95(R2003) SPECIFICATION FOR HIGH PURITY QUALITY ELECTROPOLISHED 316L STAINLESS STEEL TUBING, COMPONENT TUBE STUBS, AND FITTINGS MADE FROM TUBING
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI F81 : 2011(R2017) SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
    SEMI F73 : 2014 TEST METHOD FOR SCANNING ELECTRON MICROSCOPY (SEM) EVALUATION OF WETTED SURFACE CONDITION OF STAINLESS STEEL COMPONENTS
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    SEMI F1 : 2012 SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
    SEMI F78 : 2011(R2017) PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
    SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
    SEMI F60 : 2014 TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
    SEMI F20 : 2006E(R2017) SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
    SEMI F58 : 2008 TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL GAS DELIVERY SYSTEMS BY ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETRY (APIMS)
    SEMI E49.6 : 2003(R2011) GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS
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