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SEMI F92 : OCT 2012

SEMI F92 : OCT 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR DIMENSION OF COMPACT SIZE THREE PORT COMPONENTS FOR 1.5 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up the properties and physical dimensions of two port components for 1.5 inch type surface mount gas distribution systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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