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SEMI F85 : 2012

SEMI F85 : 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets up the properties and physical dimensions of one port components for 1.125 inch type surface mount gas distribution system. Pertains to one-port/four-fastener components.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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