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SEMI E5:2020
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Hardcopy
06-09-2021
English
01-02-2020
The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host.
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