SEMI E5 : 2019
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Hardcopy
05-10-2020
English
02-03-2019
The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host.
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