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SEMI E5:2023

SEMI E5:2023

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

Available format(s)

Hardcopy

Superseded date

11-03-2024

Language(s)

English

Published date

01-03-2023

Publisher

Semiconductor Equipment & Materials Institute

This Standard, otherwise known as the Specification for SECS-II messages, works with the Protocol Layer to define how messages are communicated between equipment and host.

DocumentType
Revision
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI G66:1996(R2023) Test Method for the Measurement of Water Absorption Characteristics for Semiconductor Plastic Molding Compounds
SEMI E30.1:2017(R2023) Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E88:2023 Specification for AMHS Storage SEM (Stocker SEM)
SEMI E116:2023 Specification for Equipment Performance Tracking
SEMI E30.5:2002(R2023) Specification for Metrology Specific Equipment Model (MSEM)
SEMI E30:2023 Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E179:2023 Specification for Protocol Buffers Common Components
SEMI E126:2008(R2023) Specification for Equipment Quality Information Parameters (EQIP)
SEMI E82:2006(R2023) Specification for Interbay/Intrabay AMHS SEM (IBSEM)

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Hardcopy - English
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