SEMI E54.11:2016(R2021)
Current
Current
The latest, up-to-date edition.
Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-1970
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.