SEMI E54.11 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES
10-08-2021
12-01-2013
Describes the minimum attributes, services and behavior an EPD must support to be interoperable on the Sensor/Actuator Network.
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