SEMI E54.4:2022
Current
The latest, up-to-date edition.
Specification for Sensor/Actuator Network Communications for DeviceNet
Hardcopy
English
01-04-2022
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Standard defines a Communication Specification based on the DeviceNet® protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI-specified device models (common and device specific) in a semiconductor manufacturing tool.
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Revision
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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