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SEMI E54.4 : 2016

SEMI E54.4 : 2016

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR DEVICENET

Superseded date

12-05-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a Communication Specification based on the DeviceNet protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI-specified device models (common and device specific) in a semiconductor manufacturing tool.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2005) No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E54.13 : 2011 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERNET/IP(TM)

SEMI E54.1 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL
SEMI E54.18 : 2014 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE
SEMI E54.3 : 1998(R2016) SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE
SEMI E54.10 : 2000(R2017) SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE
SEMI E54.11 : 2016 SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES
SEMI E39 : 2003(R2014) OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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