SEMI E7 : 1991(R2004)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY
01-03-2012
12-01-2013
The objective is to simplify implementation and design of future semiconductor facilities where both equipment users and suppliers can be assured of the required electrical interfaces.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E51 : 2000 | GUIDE FOR TYPICAL FACILITIES SERVICES AND TERMINATION MATRIX |
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