SEMI E79:2021
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Definition and Measurement of Equipment Productivity
Hardcopy
12-05-2022
English
01-02-2021
This Document provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries.
DocumentType |
Standard
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Superseded
|
SupersededBy | |
Supersedes |
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