SEMI E79:2021
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Definition and Measurement of Equipment Productivity
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2021
Superseded date
12-05-2022
Superseded by
€125.00
Excluding VAT
This Document provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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