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SEMI E79:2021

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for Definition and Measurement of Equipment Productivity

Available format(s)

Hardcopy

Superseded date

12-05-2022

Superseded by

SEMI E79:2022

Language(s)

English

Published date

01-02-2021

€134.60
Excluding VAT

This Document provides metrics for measuring equipment productivity of manufacturing equipment in the semiconductor and related industries.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

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