SEMI E82:2006(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Interbay/Intrabay AMHS SEM (IBSEM)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-05-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM).
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E5:2023 | Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
| SEMI E30:2023 | Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
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