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SEMI E82 : 2006(R2018)

SEMI E82 : 2006(R2018)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM)

Superseded date

23-06-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI E30.4 (05/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E23 : 2004(R2010) SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE
SEMI E4 : 1999(R2007) SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
SEMI E32 : 1997 MATERIAL MOVEMENT MANAGEMENT (MMM)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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