SEMI E84:2023
Current
Current
The latest, up-to-date edition.
Specification for Enhanced Carrier Handoff Parallel I/O Interface
Available format(s)
Hardcopy
Language(s)
English
Published date
01-08-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.Due to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E87:2018 | Specification for Carrier Management (CMS)<br> |
| SEMI E30:2023 | Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
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