SEMI E84:2023
Current
Current
The latest, up-to-date edition.
Specification for Enhanced Carrier Handoff Parallel I/O Interface
Available format(s)
Hardcopy
Language(s)
English
Published date
01-08-2023
Due to the migration to large wafer sizes, future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers, including FOUPs and open cassettes, of increasing weight.
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