SEMI E87.1 : 2017
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS)
Published date
12-01-2013
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Maps the services and data of SEMI E87 to SECS-II streams and functions, and data definitions. Also applies to all implementations of SEMI E87 that use the SECS-II message protocol [SEMI E5]. Compliance to this standard requires compliance to both SEMI E87 and SEMI E5.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Not available separately, Published within the SEMI E87 family of standards. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
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