SEMI E91 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)
Published date
12-01-2013
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Sets up a Specific Equipment Model for prober equipment (PSEM). The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in SEMI E30 (GEM).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
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