SEMI E92:2023
Current
The latest, up-to-date edition.
Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light)
Hardcopy
English
01-05-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Standard is intended to provide an appropriate level of specification that ensures modularity and interchangeability at all mechanical interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS/Light unit) and higher level part of equipment.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
This standard also refers toSEMI E1.9 ,SEMI E15.1
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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