Skip to content
Please enter a keyword to search

  • SEMI E92 : 2002E(R2015)

    View superseded by
    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
    View superseded by

    SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)

    Available format(s): 

    Superseded date:  23-06-2023

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

    Sorry this product is not available in your region.

    Add To Cart

    Abstract - (Show below) - (Hide below)

    Specifies standard specifications such as interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS/Light unit) and higher level part of equipment and its functions to provide.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001) E = Editorially modified to reflect the withdrawal of SEMI E44. (03/2006)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
    SEMI S28 : 2011 SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E64 : 2005(R2012) SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT
    SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E151 : 2011(R2017) GUIDE FOR UNDERSTANDING DATA QUALITY
    SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
    SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
    SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
    SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
    SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
    View more information

    • Access your standards online with a subscription

      Features

      • Simple online access to standards, technical information and regulations
      • Critical updates of standards and customisable alerts and notifications
      • Multi - user online standards collection: secure, flexibile and cost effective