SEMI E98.1 : NOV 2002(R2009)
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL
Published date
12-01-2013
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Describes the services and data of SEMI E98 Object-Based Equipment Model (OBEM) to SECS-II streams and functions and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001) Not available separately, Published within the SEMI E98 family of standards. (02/2009) INACTIVE - Not currently supported by the technical committee. (03/2017)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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