SEMI F17 : 95(R2003)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR HIGH PURITY QUALITY ELECTROPOLISHED 316L STAINLESS STEEL TUBING, COMPONENT TUBE STUBS, AND FITTINGS MADE FROM TUBING
01-07-2004
12-01-2013
Covers the surface condition, quality control and ordering requirements for high purity quality electropolished 316L stainless steel tubing, component tube stubs and fittings made from tubing. It provides the special criteria for nominal sizes of electropolished 316L stainless steel tubing etc used for high purity chemical liquid or gas distribution systems in semiconductor manufacturing facilities.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E49.8 : 2003(R2011) | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI F16 : 1994 | SPECIFICATION FOR 316L STAINLESS STEEL TUBING WHICH IS TO BE FINISHED AND ELECTROPOLISHED FOR HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
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