SEMI F2 : 1994
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATION FOR 316L STAINLESS STEEL TUBING FOR GENERAL PURPOSE SEMICONDUCTOR MANUFACTURING APPLICATIONS
01-07-2003
12-01-2013
Identifies applicable ASTM tubing specification requirements for 316L stainless steel tubing for use in semiconductor manufacturing facilities. As designated in ASTM A 269 nominal-wall-thickness stainless steel tubing for use in chemical/liquid/gas distribution systems in semiconductor manufacturing facilities and related research/development areas.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI F6 : 1992 | GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS |
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