SEMI F21 : 2016
Current
Current
The latest, up-to-date edition.
CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS
Published date
12-01-2013
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Pertains to classify microelectronics clean environments with respect to their molecular (non-particulate) contaminant levels.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| 11/30248115 DC : 0 | BS EN ISO 14644-8 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION |
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| DIN EN ISO 14644-8:2013-06 | Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013) |
| SEMI F51 : 2017 | GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY |
| I.S. EN ISO 14644-8:2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ACC) (ISO 14644-8:2013) |
| BS EN ISO 14644-8:2013 | Cleanrooms and associated controlled environments Classification of air cleanliness by chemical concentration (ACC) |
| UNI EN ISO 14644-8 : 2013 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION |
| SEMI E108 : 2007 | TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY |
| EN ISO 14644-8:2013 | Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013) |
| PREN ISO 14644-8 : DRAFT 2011 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011) |
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