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SEMI F24 : 2017

SEMI F24 : 2017

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR PARTICLE CONCENTRATION OF GRADE 10/0.2 INERT SPECIALTY GASES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a maximum permissible particle concentration for 10/0.2 grade inert specialty gases and to describe a reference method for its verification.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C6-5 : 1990(R2011) PARTICLE SPECIFICATION FOR GRADE 10/0.2 NITROGEN (N[2]) AND ARGON (AR) DELIVERED AS PIPELINE GAS

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