SEMI F24 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PARTICLE CONCENTRATION OF GRADE 10/0.2 INERT SPECIALTY GASES
Published date
12-01-2013
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Gives a maximum permissible particle concentration for 10/0.2 grade inert specialty gases and to describe a reference method for its verification.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI C6-5 : 1990(R2011) | PARTICLE SPECIFICATION FOR GRADE 10/0.2 NITROGEN (N[2]) AND ARGON (AR) DELIVERED AS PIPELINE GAS |
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