SEMI F3 : 1994
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
GUIDE FOR WELDING STAINLESS STEEL TUBING FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
01-11-2003
12-01-2013
Gives available procedures for welding stainless steel gas distribution systems and provides information from which subsequent standardisation and evaluations can be derived. It covers the requirements in general for the welding of stainless steel gas distribution systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI F6 : 1992 | GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS |
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