SEMI F51 : 2017
Current
Current
The latest, up-to-date edition.
GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
Published date
12-01-2013
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Gives a basic guide for the use of seals in semiconductor fabrication equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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