SEMI F6 : 1992
Current
The latest, up-to-date edition.
GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS
12-01-2013
Gives a guide for the fabrication, design and development of secondarily contained distribution piping for HPM (Hazardous production material). It covers the requirements in general for hazardous production material distribution piping for industries under the H-6 Classification of the Uniform Building Code as well as Articles 51/80 of the Uniform fire code etc. It does not cover individual exhausted enclosures ie gas cabinets and valve boxes.
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