SEMI F72 : 2014(R2021)
Current
Current
The latest, up-to-date edition.
Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Document is to define a test method to characterize the surface composition of passivated 316L stainless steel components being considered for installation into a high-purity gas distribution system.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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