SEMI F73 : 2014
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The latest, up-to-date edition.
TEST METHOD FOR SCANNING ELECTRON MICROSCOPY (SEM) EVALUATION OF WETTED SURFACE CONDITION OF STAINLESS STEEL COMPONENTS
Published date
12-01-2013
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Specifies a uniform procedure for testing the wetted surfaces of stainless steel components intended for installation into high purity gas distribution systems.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI F19 : 2015 | SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS |
| SEMI E49.5 : 2004 | GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E49.8 : 2003(R2011) | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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