SEMI F79 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE FOR GAS COMPATIBILITY WITH SILICON USED IN GAS DISTRIBUTION COMPONENTS
Superseded date
19-10-2022
Superseded by
Published date
12-01-2013
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Discovers resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI MS6 : 2008 | GUIDE FOR DESIGN AND MATERIALS FOR INTERFACING MICROFLUIDIC SYSTEMS |
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