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SEMI MS6 : 2008

SEMI MS6 : 2008

Current

Current

The latest, up-to-date edition.

GUIDE FOR DESIGN AND MATERIALS FOR INTERFACING MICROFLUIDIC SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (03/2008) Supersedes SEMI PR9. (04/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI MS7 : 2008 SPECIFICATION FOR MICROFLUIDIC INTERFACES TO ELECTRONIC DEVICE PACKAGES

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