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SEMI F81 : 2011(R2017)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS

Published date

12-01-2013

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Gives visual inspection and acceptance criteria for gas tungsten arc (GTA) welds of stainless steel and other corrosion resistant metals and alloys (CRAs) in fluid (liquid or gas) distribution systems in semiconductor manufacturing applications.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E49.5 : 2004 GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E49.8 : 2003(R2011) GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
SEMI E49.6 : 2003(R2011) GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS
SEMI F78 : 2011(R2017) PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS

SEMI F78 : 2011(R2017) PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS

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