SEMI F85 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF ONE PORT COMPONENTS FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
Sets up the properties and physical dimensions of one port components for 1.125 inch type surface mount gas distribution system. Pertains to one-port/four-fastener components.
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