SEMI F87 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
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Sets up the properties and physical dimensions of two port components for 1.125 inch type surface mount gas distribution system. Pertains to three-port/four-fastener components (except mass flow controllers and mass flow meters).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI F102 : 2006(R2013) | GUIDE FOR SELECTING SPECIFICATIONS FOR DIMENSION OF COMPONENTS FOR SURFACE MOUNT GAS DISTRIBUTION SYSTEMS |
| SEMI F20 : 2006E(R2017) | SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS |
| SEMI E49.8 : 2003(R2011) | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY GAS DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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