SEMI F87 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE FOUR FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
Sets up the properties and physical dimensions of two port components for 1.125 inch type surface mount gas distribution system. Pertains to three-port/four-fastener components (except mass flow controllers and mass flow meters).
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