SEMI F89 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR DIMENSION OF COMPACT SIZE MASS FLOW CONTROLLERS AND MASS FLOW METERS FOR 1.5 INCH TYPE SURFACE MOUNT GAS DISTRIBUTION SYSTEMS
Published date
12-01-2013
Sets up the properties and physical dimensions of mass flow controllers and mass flow meters for 1.5 inch type surface mount gas distribution systems.
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