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SEMI G32 : 1994(R2011)

Current

Current

The latest, up-to-date edition.

GUIDELINE FOR UNENCAPSULATED THERMAL TEST CHIP

Published date

12-01-2013

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Details recommendations for a standardized thermal test chip design for referee test purposes. Sample data format for the test chip can be found in Appendix A. The following recommendations are made for the design of thermal test chips for VLSI package characterization based on the results of computer simulations of various chip-substrate configurations.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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