SEMI G77 : 1999(R2020)
Current
Current
The latest, up-to-date edition.
SEMI G77 - Specification for Frame Cassette for 300 mm Wafers
Published date
01-10-2020
The purpose of this Standard is to specify the mechanical features for a 300 mm wafer frame cassette used between the wafer mounting process and the die-bonding process.
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