SEMI G81 : 2007(R2015)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MAP DATA ITEMS
Published date
12-01-2013
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Specifies the data items that relate to electronic substrate mapping.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI G81.1 (05/2015)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
|
SEMI G85 : JUL 2003 | SPECIFICATION FOR MAP DATA FORMAT |
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