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SEMI G81 : 2007(R2015)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR MAP DATA ITEMS

Published date

12-01-2013

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Specifies the data items that relate to electronic substrate mapping.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI G81.1 (05/2015)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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