SEMI G85 : JUL 2003
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MAP DATA FORMAT
Published date
12-01-2013
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Explains in detail how the data items that relate to electronic mapping are to be represented in a file format.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E107 : 2002(R2010) | SPECIFICATION OF ELECTRIC FAILURE LINK DATA FORMAT FOR YIELD MANAGEMENT SYSTEM |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI T13 : 2004(R2010) | SPECIFICATION FOR DEVICE TRACKING: CONCEPTS, BEHAVIOR AND SERVICES |
| SEMI G81 : 2007(R2015) | SPECIFICATION FOR MAP DATA ITEMS |
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