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SEMI G94:2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR COIN-STACK TYPE TAPE FRAME SHIPPING CONTAINER FOR 300 MM WAFER
Superseded date
15-12-2023
Published date
07-02-2013
Specifies the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
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