SEMI G94:2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR COIN-STACK TYPE TAPE FRAME SHIPPING CONTAINER FOR 300 MM WAFER
Superseded date
15-12-2023
Superseded by
Published date
07-02-2013
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Specifies the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2013)
|
| DocumentType |
Revision
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
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| SupersededBy |
| SEMI 3D3:2013 | GUIDE FOR MULTIWAFER TRANSPORT AND STORAGE CONTAINERS FOR 300 MM, THIN SILICON WAFERS ON TAPE FRAMES |
| SEMI 3D3:2013(R2018) | Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames |
| SEMI 3D3:2023 | Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames |
| SEMI G74 : 1999(R2015) | SPECIFICATION FOR TAPE FRAME FOR 300 MM WAFERS |
| SEMI G87 : 2008(R2015) | SPECIFICATION FOR PLASTIC TAPE FRAME FOR 300 MM WAFER |
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