SEMI G94:2013(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Hardcopy
15-12-2023
English
01-11-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
| DocumentType |
Standard
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| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
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| SupersededBy | |
| Supersedes |
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