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SEMI G94:2013(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
Hardcopy
15-12-2023
English
01-11-2018
This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.
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