SEMI HB4 : 2013
Current
Current
The latest, up-to-date edition.
SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)
Published date
09-10-2013
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Specifies the equipment automation interface for communication and control of process, automation and metrology equipment used in HB-LED manufacturing.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (09/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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