SEMI M16:2021
Current
Current
The latest, up-to-date edition.
Specification for Polycrystalline Silicon
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification is intended for use in procurement of polycrystalline silicon for growth of electronic grade monocrystalline silicon ingots.
| DocumentType |
Revision
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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