SEMI M20:2015 (R2021)
Current
Current
The latest, up-to-date edition.
Practice for Establishing a Wafer Coordinate System
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
€125.00
Excluding VAT
Processing systems now employed in advanced device manufacturing use aligning mechanisms to position the wafer rotationally and in x-y prior to processing.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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