SEMI M20:2015 (R2021)
Current
Current
The latest, up-to-date edition.
Practice for Establishing a Wafer Coordinate System
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.Processing systems now employed in advanced device manufacturing use aligning mechanisms to position the wafer rotationally and in x-y prior to processing.
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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