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SEMI M23 : 2003(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR POLISHED MONOCRYSTALLINE INDIUM PHOSPHIDE WAFERS
20-07-2023
12-01-2013
Describes the substrate requirements for monocrystalline high-purity indium phosphide wafers used in semiconductor and electronic device manufacturing. Dimensional and crystallographic orientation characteristics are the only standardized properties set forth herein.
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