SEMI M38:2012(R2023)
Current
Current
The latest, up-to-date edition.
Specification for Polished Reclaimed Silicon Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category.
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