SEMI M38 : 2012(R2018)

Name: SEMI M38 : 2012(R2018)
Brand: SEMI

Superseded

SPECIFICATION FOR POLISHED RECLAIMED SILICON WAFERS

Superseded date

16-11-2023

Published date

08-11-2018

Publisher

Semiconductor Equipment & Materials Institute

Describes requirements for reclaimed silicon wafers to be used for testing and process monitoring in semiconductor manufacturing.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Revision
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI M38:2012(R2023)

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SEMI M59 : 2014	TERMINOLOGY FOR SILICON TECHNOLOGY
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SEMI M24 : 2007	SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON PREMIUM WAFERS
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